On the 10th, the reporter learned from the Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences that researchers from the institute and other units have developed a new type of femtosecond laser plasma lithography (FPL). Using this technology, the researchers realized the rapid preparation of high-quality micro-nano periodic structures on the surface of 100-nm-thick silicon-based graphene oxide films. Related results were published in "Light: Science and Application".
Since the discovery of graphene, two-dimensional materials have gradually entered people's field of vision and become a research hotspot in the field of materials. Techniques such as self-assembly, electron beam etching, and extreme ultraviolet lithography can prepare micro-nano structures on graphene, thereby adjusting their band gap, absorption, carrier mobility, and other properties. However, these technologies have the problems of time-consuming, high cost and lack of versatility. Therefore, how to reduce costs and efficiently prepare micro-nano structure graphene is an important problem that needs to be solved at present.
Femtosecond laser processing technology is widely used in the field of ultra-fine micro-nano processing of various materials with its unique advantages of ultra-high peak power and ultra-short pulse duration. However, taking laser direct writing as an example, although its precision is very high, the efficiency of ultra-fine micro-nano preparation still needs to be improved. At the same time, ensuring processing accuracy and processing efficiency is one of the main problems that the technology needs to solve. "How to use flexible and simple processing methods to solve the problems of processing accuracy and processing efficiency is the key to expanding the practicality of femtosecond lasers." Said Yang Jianjun, a researcher at the Changchun Institute of Optics, Precision Machinery and Physics, Chinese Academy of Sciences.
The study proved for the first time that FPL technology can realize the rapid preparation of large-area high-quality sub-micron periodic structures on two-dimensional thin film materials. Thanks to the non-linear optical characteristics of the femtosecond laser, the FPL technology processing process is not susceptible to material surface defects, impurities and other factors, and the processing substrate is not susceptible to material types. The processed materials exhibit excellent mechanical properties and can be transferred intact using traditional wet transfer methods. This laid the foundation for the flexible preparation of periodic micro-nano structures of related materials. (Reporter Lu Chengkuan)
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