UPC shaping tool <br> <br> micro-nano far, three-dimensional micro-molding generally refers to micromachining and semiconductor manufacturing technology (e.g., photolithography method, an ion beam machining method, etc.). These processing methods have their inadequacies, such as the difficulty of obtaining smooth surfaces, which are determined by their forming characteristics, because the inclined planes and curved surfaces are formed by stepwise approximation. In contrast, the cutting and forming process of the three-dimensional micro-forming process based on the super-precision diamond cutting tool is performed by a sharp cutting edge, so that a smooth inclined plane or curved surface can be obtained. In addition, our tools have improved properties such as very high shape accuracy. Another advantage is the increased range of materials available.
Due to the above characteristics, the demand for such tools has been increasing in recent years. It is not only used for the processing of photovoltaic basic components, but also in the fields of microelectromechanical systems (MEMS), micromachines and biomedicine. We have successfully developed three types of micro-nano forming tools, and an example of forming them will be described below.
UPC nano mill <br> <br> rectangular rectangular nano mill for forming ultra fine groove of the free-form surface. We have developed the world's smallest single crystal diamond end mill with a radius of φ30 μm. As described above, the tip of the nano-end mill is made by super-finishing the single crystal diamond, and the cutting edge is very sharp, straight and wear-resistant. This tool is expected to be applied to grooved machining including three-dimensional curves such as optical components, medical chips, and micromechanical parts.
UPC shaping nano mill rectangular <br> <br> example using a nano mill and a rotary radius 200? M of the mold tool to form a three-dimensional milling machining examples clearly show that the ultrafine groove, formed by the movement of the tool The tool is accurately reproduced onto the workpiece being machined without any burrs. The surface roughness (P-V value) of the groove bottom reached 101 nm.
UPC nano ball end mill <br> <br> in industries related to IT (Information Technology), the basic element for rapid development of high-speed large-capacity information. One such technique is the microlens array. The array structure is a combination of a series of convex and concave lenses integrated in a three-dimensional scale. In recent years, the lens array has been applied to optical communication and liquid crystal projection screens. Our UPC nano ball end mills can be used to machine three-dimensional lens surfaces and free-curvature surfaces (such as molds for manufacturing microlens arrays).
We have developed the world's smallest level of tool nose arc (R = 30?m) and can produce the world's highest level of cutting edge arc profile (50nm tip). With such a tool, it is possible to realize a three-dimensional shape forming process with nanometer precision.
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